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Optical Coating & Photolithography

Optical Coating & Photolithography
From Volume Production to Precision Custom

From standard functional coatings on glass substrates to precision UV-to-IR optical filters, micron-level photolithographic patterning, and sputtered functional films on resin and 3D parts, we match the right coating process to your specifications and production volume.

250nm–15μm
UV to IR
Wavelength Range
1μm
Pattern Accuracy
Down To
ISO Class 1
Photolithography
Cleanroom
From 1 pc
Prototype to
Volume Production
Vacuum optical coating systems in a cleanroom

Choose the Right Coating Solution

Every product has different requirements for specifications, volume, and cost. We offer three coating solutions based on your application, so each project runs on the right process.

Standard Coating

Standard Functional Coating

Stable volume production, cost-focused. For glass substrate coatings with defined specifications and high-volume supply needs.

  • Anti-reflection (AR) coating
  • ITO / FTO transparent conductive film
  • Metal sputtering (Cr / Au / Al)
  • Dielectric multilayer coating
View standard coatings
Precision Optical Coating

Precision Optical Coating

Tight optical specifications, from prototype to production. For optical components and sensing applications with strict wavelength, transmittance, and uniformity requirements.

  • UV to IR bandpass filters
  • Laser mirrors and dichroic mirrors
  • Wedge filters and multi-zone filters
  • Micron-level photolithographic patterning
View precision coatings
Sputtering Coating

Sputtered Functional Films

Low-temperature deposition with strong adhesion. For resin, metal, and 3D-shaped parts that need both function and appearance.

  • Aluminum mirrors on resin
  • EMI shielding films
  • Decorative and color films
  • Corrosion-resistant protective layers
View sputtered films

Standard Functional Coating

A range of coating processes for different functional needs, improving the optical and electrical performance of glass substrates.

Optical

Anti-Reflection (AR) Coating

Reduces surface reflectance to < 0.5% for higher transmittance. Used in camera lenses, sensor windows, and display cover glass.

Conductive

ITO / FTO Transparent Conductive Coating

Transparent conductive oxide films with adjustable sheet resistance of 10–200 Ω/□. Used in touch panels, solar cells, and heated defogging glass.

Metal

Metal Sputtering (Cr / Au / Al)

Highly adherent metal films for electrode, masking, or heat-dissipation layers. Widely used in MEMS microfabrication and semiconductor wafer processes.

Multilayer

Dielectric Multilayer Coating

Alternating high- and low-index layers for bandpass filters, high reflectors, and beam splitters, with customizable wavelength ranges.

Precision Optical Coating

For high-specification applications in sensors, lasers, semiconductor equipment, and medical instruments, we handle coating design, deposition, and measurement in one flow, with prototypes available from a single piece.

◎

Ion-Assisted Deposition First

Ion-assisted deposition (IAD) is the main process, supported by electron beam evaporation and sputtering. Films are dense, highly adherent, and resistant to moisture-induced spectral shift.

◈

UV to IR Coverage

Covers 250 nm UV to 15 μm IR. Optical simulation and measurement are also available as standalone services.

⬡

Wide Range of Substrates

Glass, quartz, resin, metal, and crystal materials; flats, lenses, prisms, and irregular shapes, from small diameters to large substrates.

✦

Full Measurement and Reliability Testing

Managed under an ISO 9001 quality system, with six spectrophotometers, an IR spectrophotometer, laser interferometers, and humidity and thermal shock testing.

Featured Products and Measured Specifications

i-Line Bandpass Filter (365 nm)
Semiconductor Lithography

Steep edges and excellent in-plane uniformity for semiconductor exposure equipment.

Measured Specifications
TransmittanceApprox. 90%
FWHM≤ 7 nm
Center wavelength variation≤ 2 nm (across Φ100 mm)
220 nm UV Bandpass Filter
Deep UV

A low-UV-absorption deposition method delivers measured curves that match the design with high repeatability.

Measured Specifications
TransmittanceApprox. 90% (around 220 nm)
ReliabilityNo significant spectral shift after 288 h at 60 °C / 90% RH
Infrared Bandpass Filters
Gas Sensing

Pass only the absorption band of the target gas. Any center wavelength in the IR range can be designed, with proposals available from a single piece.

Specifications
Target gasesCH₄, CO₂, CO, NO, SO₂, O₃, SF₆, etc.
ApplicationsNDIR gas sensors and analyzers
Laser Mirrors
Laser

High reflectors for single or multiple laser wavelengths, with selected observation wavelengths transmitted.

Specifications
KrF 248 nmQuartz substrate, reflectance ≥ 99.5%
YAG and other lasersCustom for 355 / 532 / 633 / 1,064 nm
Multi-laserBlue, diode, and fiber lasers
Wedge and Multi-Zone Filters
Special Filters

Vary film thickness or combine several coatings on one substrate to simplify optical module design.

Specifications
Wedge filterCut-off wavelength shifts continuously with position
Multi-zone filterCombine ND, AR, dichroic, and metal coatings
ApplicationsMedical diagnostic and office equipment
Antibacterial AR Coating
Medical · Touch

Combines anti-reflection and antibacterial performance on glass or resin substrates, with an optional anti-fingerprint (AF) top layer.

Specifications
Antibacterial effectInhibits growth of Staphylococcus aureus and E. coli
ApplicationsMedical optical parts, touch panels

Infrared Long-Pass Filters (Temperature Sensing and Thermography)

Specification Blocking Band (nm) Blocking Tavg 5% Cut-On (nm) 50% Cut-On (nm) Pass Band (nm) Pass Tavg
LWP 2.4 μm400–2,200≤ 1%2,320 ± 302,400 ± 502,500–3,600≥ 90%
LWP 5.5 μm400–5,000≤ 1%5,500 ± 400—7,500–13,500≥ 75%
LWP 6.6 μm1,500–6,400≤ 1%6,600 ± 4006,950 ± 4007,500–14,000≥ 80%

* Pass-band transmittance above 90% is achievable. 8–14 μm AR coatings and 8–14 μm wideband pass filters are also available for IR cameras, thermography, thermometers, and automotive sensing.

Precision Optical Thin-Film Products

CategoryProducts
Anti-reflectionBroadband, low-reflection, 3-wavelength, UV-visible, laser, antibacterial, and 8–14 μm IR AR
FiltersBandpass (multi-band, deep UV, IR), IR cut, UV cut, UV-IR cut, ND, ND + IR cut, notch, fluorescence/excitation, and wedge filters
MirrorsDichroic, cold, hot, laser, and metal (Ag, Al) mirrors
Beam splittersPolarizing beam splitters (PBS), non-polarizing cube beam splitters
Functional filmsITO transparent conductive, water-repellent/hydrophilic, anti-fouling, and gas barrier films

Photolithographic Patterning

By combining photoresist processing with thin-film deposition, different functional coatings can be placed precisely on one substrate for sensors, camera modules, encoders, and optical communication components.

◎

Coating and Patterning in One Flow

Deposition and patterning are completed on the same line using lift-off or etching, reducing handling risk and lead time.

◈

Micron-Level Accuracy

Mask alignment replaces mechanical holders, enabling dichroic line/space patterns down to 1 μm.

⬡

Sharp Boundaries, Smaller Gaps

Pattern edge blur of about 5 μm versus about 100 μm with metal masks, so adjacent filter regions such as RGB bandpass filters can sit side by side.

✦

Multi-Function Integration

Combine several coatings on one substrate, such as dichroic + light-shielding or mirror + absorptive + AR, to simplify optical module design.

Patterning Specifications

  • Patterning processLift-off / Etching
  • Pattern accuracyLine/space down to 1 μm
  • ExposureMask aligner
  • Max. substrate sizeΦ6 in
  • Max. substrate thickness25 mm (prisms supported)
  • Dielectric multilayer patterningFilm thickness up to 7 μm
  • EnvironmentISO Class 1 cleanroom

* Achievable accuracy depends on coating type and pattern design. Send us your drawings for evaluation.

Dichroic AR Light-shielding Metal Absorptive Mirror ND
Photolithography process illustration

Sputtered Functional Films

High-speed sputtering causes minimal heat damage, forming uniform, dense, and highly adherent films on resin, metal, and 3D-shaped parts.

◎

No Hard Coat Needed on Resin

With SiO₂ polymerization treatment, aluminum can be coated on acrylic and other resins without a hard coat, with no peeling after dozens of tape tests.

◈

Uniform on Curved Surfaces

Film thickness is nearly identical at the top and bottom of steep lenses, keeping reflectance variation low.

⬡

Corrosion-Resistant Protection

Aluminum with a silicon oxide protective layer shows no change after more than 10 minutes under 1% KOH solution, with stable results in volume production.

✦

Interference Colors

Multilayer interference produces a wide range of colors, and custom colors can be discussed.

Sputtering Specifications

  • Max. workpiece sizeW160 × L325 × H110 mm
  • Resin substratesPC, PET, PBT, ABS, PMMA, COP, COC
  • Other substratesGlass, metal, silicon wafers, lenses, 3D parts
  • Al mirror reflectance on resinApprox. 89–90% (400–700 nm)
  • Batch consistencyNegligible variation across 5 batches

* Max. workpiece size refers to the effective area for Al + SiOx films. Reflectance measured on PC substrates.

Inside a sputtering system: coated substrates on a rotating drum and sputtering targets

Available Materials

Metal films

AlAgCrTiAuCuPtPdRhRuWGeHfTaMgMoSiSnZnZrNiFe

Oxide films

NbOxTiOxAl₂O₃HfO₂Ta₂O₅SiO₂ZrO₂

EMI Shielding Films

Ag > Cu > Al > Cr > Ti

Shielding performance ranking measured at 50 MHz–1 GHz. Oxide AR coatings provide no shielding.

  • AlEffective from 50 nm, better at 500 nm+
  • Ag, CuHigh shielding from 100 nm
  • CrClear shielding from 500 nm
  • TiEffective at 1,000 nm

Application Examples

Shielding films for automotive interior parts Cr gradient decorative films for lighting Metal films for photomasks Gas barrier films for appliance parts Decorative films for cosmetic glass bottles Aluminum coating for cosmetic tubes Color films for motorcycle parts Color films for fishing tackle Decorative films for faucet handles Aluminum coating for resin tools

Applications and Additional Services

From medical and measurement to semiconductor and laser equipment, we also handle pre- and post-coating processes to reduce handoffs between suppliers.

Applications

Applications

Medical devices (endoscopes, ophthalmic, diagnostics) Measurement and analytical instruments Gas sensors Semiconductor exposure and inspection equipment Laser processing equipment Camera and sensor modules Projectors Optical communication Automotive sensing Displays and touch panels MEMS and wafer processing
Services

Additional Services

Precision cleaning, glass dicing, polishing, edge blackening, assembly and bonding, plus inspection and measurement services. We handle everything from single prototypes to volume production, and common bandpass filters are in stock as single pieces for development testing.

What to Include in Your Inquiry

Coating quotes depend on the substrate, coating type, and specifications. Sharing the details below in your first inquiry helps us assess feasibility faster and give you an accurate quote and lead time.

1

Application

What the part is used for, such as sensors, camera modules, laser equipment, displays, or medical instruments.

2

Substrate

Material (glass, quartz, resin, silicon wafer, metal, etc.), form (flat, lens, prism, 3D part), dimensions, and thickness.

3

Coating Type and Optical Specs

Coating type (AR, bandpass, mirror, ITO, metal, etc.), wavelength range, target transmittance or reflectance, and angle of incidence. Please attach spectral curves if available.

4

Coated Surfaces and Patterns

Single- or double-sided coating. For photolithographic patterning or partial coating, please attach a drawing with pattern dimensions and tolerances.

5

Reliability Requirements

Operating environment and test conditions, such as high temperature and humidity, thermal shock, adhesion, or abrasion resistance.

6

Quantity

Prototype quantity and estimated production volume or annual usage.

7

Project Stage and Timeline

Whether the project is in development, prototyping, or production, and your target delivery date.

8

Substrate Supply and Inspection

Whether you will supply the substrates or need us to source them, and whether you need inspection data such as spectral measurements.

Specifications not finalized yet? Share your application and basic requirements, and we will help you evaluate the right coating solution. If confidentiality is required, please let us know in your inquiry.

Ready to Get Started?

Send us your specifications or drawings. We will reply within one business day to help you evaluate the right coating process and provide a quote.

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