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Glass Wafer & Through Glass Via

Glass Wafer · TGV SubstratesCore Materials for Chip Packaging

From precision glass wafer processing to TGV substrates, SEMI-compliant and built for 5G/6G RF modules, AI packaging (CoWoS/HBM), and MEMS sensors — with one-stop optical coating included.

6"–12"Precision Glass Wafers
<0.5μmTTV Precision (6")
30–150μmTGV Via Diameter
<6Dielectric Constant
Precision glass wafer / TGV substrate
Core Technology

Four Core Technology Services

From glass substrate processing to functional coatings, delivering complete solutions for the semiconductor and optoelectronics industries.

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Glass Wafer Processing

Supplying 6", 8", and 12" precision glass wafers with TTV < 0.5μm (6") and surface roughness Ra < 0.3nm, fully compliant with SEMI semiconductor manufacturing standards.

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TGV Glass Substrates

Through Glass Via technology with via diameters of 30–150μm and a dielectric constant < 6, for 5G/6G RF front-ends, AI CoWoS / HBM packaging, and MEMS sensors.

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Specialty Optical Glass

A wide range of specialty optical glass materials, including ultra-thin Carrier Glass support substrates, piezoelectric synthetic quartz, and Blue Glass IR-cut filters.

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Optical Coating Services

One-stop functional coating services including anti-reflective (AR) coatings, ITO/FTO transparent conductive films, metal sputtering (Cr/Au/Al), and multilayer dielectric coatings.
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Through Glass Via

TGV Glass Substrates
Next-Generation Packaging Interconnects

Through Glass Via (TGV) replaces traditional silicon substrates with low-loss glass, delivering superior electrical insulation, lower dielectric loss, and higher integration density. As demand surges for 5G mmWave, AI high-performance computing packaging, and MEMS sensors, TGV is becoming an essential material for advanced packaging.

Via Diameter
30 – 150 μm
Via Pitch
50 – 500 μm
Substrate Thickness
0.1 – 0.7 mm
Dielectric Constant (1GHz)
< 6
CTE
3 – 7 ppm/°C
Key Applications
5G/6G · AI Packaging · MEMS
TGV glass substrate
Specifications

Complete Specification Comparison

Covering full technical specifications for both glass wafer processing and TGV substrates, with customization available on request.

Specification6" Glass Wafer8" Glass Wafer12" Glass Wafer
Wafer Diameter150 mm200 mm300 mm
TTV Precision< 0.5 μm< 0.8 μm< 0.8 μm
Processable Thickness0.1 – 2.0 mm
Surface Roughness (Ra)< 0.3 nm (polished surface)
Available MaterialsAlkali-free borosilicate glass / Quartz glass / BK7 optical glass / Specialty optical glass
Compliant StandardsSEMI M1, M20, M78
SpecificationTGV Glass SubstrateNotes
Via Diameter30 – 150 μmCustomizable by application
Via Pitch50 – 500 μmSmaller pitch achievable with high-density arrays
Substrate Thickness0.1 – 0.7 mmUltra-thin down to 100 μm
Dielectric Constant (1 GHz)< 6Low-loss, outperforming organic substrates
CTE3 – 7 ppm/°CClose to silicon's CTE, reducing warpage
Warpage ControlUltra-low warpage designSuitable for back-end thinning processes
Key Applications5G RF Modules · AI HBM Packaging · MEMS—
Solutions

Two Partnership Models

Choose the partnership model that best fits your application — from sample development to full-scale production, we support it all.

Contract Manufacturing

Precision Glass Wafer Contract Processing

One-stop processing for 6", 8", and 12" precision glass wafers — from dicing, grinding, and polishing to functional coatings — covering the full process chain for semiconductor and optoelectronic applications.

  • Ultra-high precision, TTV < 0.5μm (6")
  • Surface roughness Ra < 0.3 nm
  • Multiple glass materials: alkali-free, quartz, BK7
  • Integrated optical coatings (AR/ITO/metal sputtering)
  • From small-batch samples to full-scale mass production
Applications

Where It's Used

From advanced semiconductor packaging to precision optical instruments, supporting a wide range of high-tech manufacturing needs.

5G and AI advanced packaging application

5G/6G · AI Advanced Packaging

TGV substrates are used in 5G mmWave RF front-end modules (RFFE), CoWoS packaging for AI accelerators, and high-bandwidth memory (HBM), meeting the demands of high-density interconnects and low-loss transmission — a key material for AI computing infrastructure.

MEMS, precision optics, medical and aerospace applications

MEMS · Precision Optics · Medical & Aerospace

Precision glass wafers are widely used in MEMS pressure sensors, gyroscopes, camera lens optical components, medical diagnostic instruments, and aerospace sensing systems — maintaining high reliability even under extreme heat, pressure, and vibration.

Specialty Glass

Specialty Optical Glass Processing

Custom processing services for Carrier Glass, piezoelectric materials, Blue Glass, and a wide range of optical glass types.

Piezoelectric material

Piezoelectric Components

Piezoelectric Material

Made from synthetic quartz and available in plano, plano-convex, and bi-convex cut forms, suitable for high-reliability applications in aerospace, telecom base stations, and satellites.

Material
Synthetic Quartz
Size
φ4.5–φ14mm / 1.8×3–30×30mm
Frequency
5MHz (O3) – 120MHz (O5)
Cut Type
Plano / Plano-convex / Bi-convex / Doubly rotated cut
Blue Glass IR cut filter

Blue Glass (IR Cut Filter)

IR Absorbing Filter / Blue Glass

Blocks infrared light above 700nm to ensure accurate color reproduction on CMOS sensors, widely used in smartphone camera modules, automotive lenses, and security surveillance.

Material
SCHOTT BG / CDGM QB / NEG
Size
77×77mm (standard)
Thickness
0.11 / 0.145 / 0.21 / 0.3mm
Cutoff Wavelength
>700nm IR blocking
Other optical glass

Other Optical Glass

Other Optical Glasses

Precision cutting, grinding, and polishing services for optical glass from multiple leading brands, covering applications from camera lenses to medical instruments.

SCHOTT B270 / D263T
High-transmission optics
JGS1 (Fused Silica)
UV optics
OHARA Series
Camera, medical
CORNING Eagle XG
TFT-LCD substrates
Size
φ8–φ400mm
Thickness
0.07–15.0mm
Quality Assurance

Quality Inspection Equipment

Equipped with professional optical measurement instruments to ensure every glass substrate meets the strictest quality standards in the semiconductor and optics industries.

TTV measurement equipment

TTV (Total Thickness Variation) Measurement

Zygo Interferometer

Measurement Item
Total Thickness Variation
Precision
0.1 μm
Max Size
D300mm
Flatness measurement equipment

Flatness Measurement (Warp / Bow)

Interferometer

Measurement Item
Warp / Bow
Precision
0.1 μm
Max Size
D300mm
Surface roughness measurement equipment

Surface Roughness Measurement

Veeco White Light Interferometer

Measurement Item
Ra surface roughness
Precision
0.01 μm
Spec Standard
Ra ≤ 0.5nm
Particle inspection equipment

Particle & Dust Inspection

Optical Particle Counter

Measurement Item
Surface particle size
Precision
0.1 μm
Applicable To
Glass Wafer / Carrier Glass

Ready to Get Started?

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